Wafer-level site-controlled growth of silicon nanowires by Cu pattern dewetting

Research paper by Zhishan Yuan, Yunfei Chen, Zhonghua Ni, Yuelin Wang, Hong Yi, Tie Li

Indexed on: 29 Aug '15Published on: 29 Aug '15Published in: Nano Research


An approach for the wafer-level synthesis of size- and site-controlled amorphous silicon nanowires (α-SiNWs) is presented in this paper. Microscale Cu pattern arrays are precisely defined on SiO2 films with the help of photolithography and wet etching. Due to dewetting, Cu atoms shrink to the center of patterns during the annealing process, and react with the SiO2 film to open a diffusion channel for Si atoms to the substrate. α-SiNWs finally grow at the center of Cu patterns, and can be tuned by varying critical factors such as Cu pattern volume, SiO2 thickness, and annealing time. This offers a simple way to synthesize and accurately position a SiNW array on a large area.