The energy spectra of clusters formed during ion sputtering of metals

Research paper by V. I. Matveev, S. A. Kochkin

Indexed on: 01 Dec '03Published on: 01 Dec '03Published in: Technical Physics Letters


We propose a method for calculating the energy spectra of neutral and charged clusters with the number of atoms N≤5 sputtered from a metal surface during ion bombardment. The calculated energy distributions of clusters emitted from tantalum and niobium bombarded with atomic gold ions are compared to the published experimental data.