Small-size systems for separation of primary ion beams in microprobe equipment

Research paper by S. A. Kuzema, S. N. Mordik

Indexed on: 01 Nov '01Published on: 01 Nov '01Published in: Technical Physics


The ion-optical properties and other characteristics of various versions of a double-focusing mass separator are studied. In these designs, the ion transit path is shortened by appropriately selecting the geometry of the ion-optical system. The resolving power of the separating systems is determined with allowance for second-order aberrations.