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Single-exposure profilometry using partitioned aperture wavefront imaging

Research paper by Roman Barankov, Jerome Mertz

Indexed on: 19 Jul '13Published on: 19 Jul '13Published in: Physics - Optics



Abstract

We demonstrate a technique for instantaneous measurements of surface topography based on the combination of a partitioned aperture wavefront imager with a standard lamp-based reflection microscope. The technique can operate at video rate over large fields of view, and provides nanometer axial resolution and sub-micron lateral resolution. We discuss performance characteristics of this technique, which we experimentally compare with scanning white light interferometry.