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RF generation of the plasma jet channel for the jet PCVD

Research paper by L. Bárdoš, N. Q. Vu

Indexed on: 01 Jul '89Published on: 01 Jul '89Published in: Czechoslovak Journal of Physics



Abstract

Breakdown conditions for creation of the hollow cathode discharge in the nozzle passed through the rf powered electrode and creation of the plasma jet channel in PCVD reactor are studied. Pure nitrogen is used for measurements. The creation of jet channel is easier for smaller rf electrodes. The breakdown depends on the pressure and on the gas inflow rate. The plasma potential and the self-bias potential is influenced by the covering of reactor walls and the rf electrode by a dielectric layer.