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Quantitative low energy depth profiling of SiGe laterally nonuniform structures

Research paper by Alexander Merkulov, Paula Peres, David James Larson, Michel Schuhmacher

Indexed on: 01 Jun '18Published on: 02 Mar '18Published in: Journal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B



Abstract

Journal of Vacuum Science & Technology B, Volume 36, Issue 3, May 2018.