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Probe card with pyramid shaped thin film contacts

Imported: 24 Feb '17 | Published: 06 Jan '04

Kiyoshi Takekoshi

USPTO - Utility Patents

Abstract

Disclosed is a probe card comprising a probe having at thin film-like frame-like base section formed along the lower circumferential surface of an imaginary pyramid having at least a pyramidal top portion, a contact terminal section formed along the outer circumferential surface of the top portion of the imaginary pyramid, and at least one thin film-like joining section having a predetermined shape and serving to join the contact terminal section to the base section. The probe having a triangular pyramidal or conical shape as required.

Description

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING

The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate presently preferred embodiments of the invention, and together with the general description given above and the detailed description of the preferred embodiments given below, serve to explain the principles of the invention.

FIG. 1 is a plan view schematically showing a contactor according to one embodiment of the probe card of the present invention;

FIG. 2A is an oblique view showing in a magnified fashion a probe of the probe card shown in FIG. 1;

FIG. 2B is a cross sectional view showing in a magnified fashion a probe of the probe card shown in FIG. 1;

FIG. 2C is a plan view showing in a magnified fashion a probe of the probe card shown in FIG. 1;

FIG. 3 is a cross sectional view showing a silicon wafer in the process of forming a concave portion for preparation of a probe member, which is included in the manufacturing process of a probe card of the present invention;

FIG. 4 is a cross sectional view showing the step of loading a molding material in the concave portion shown in FIG. 3;

FIG. 5 is a cross sectional view showing the process of transferring the molded body shown in FIG. 4 onto an insulating substrate;

FIG. 6 is a side view showing the process of forming a resist film and an underlying metal thin film on the molded body shown in FIG. 5;

FIG. 7 shows the process of forming a metal thin film for a probe on the molded body shown in FIG. 6;

FIG. 8 shows the process of removing the resist film, the underlying metal thin film and the molded body from the state shown in FIG. 7;

FIG. 9A is an oblique view showing in a magnified fashion a probe according to another embodiment of the probe card of the present invention;

FIG. 9B is a plan view showing in a magnified fashion a probe according to another embodiment of the probe card of the present invention;

FIGS. 10A to

10F are plan views each showing a probe of a probe card according to another embodiment of the present invention;

FIGS. 11A to

11E collectively show the probe manufacturing process using a laser technology;

FIG. 12 is a front view, partly broken away, showing a probing chamber of a conventional probe apparatus; and

FIG. 13 is a plan view showing the inner construction of the probe apparatus shown in FIG.

12.

Claims

1. A prove card having a plurality of probes that are brought into contact with at least one element formed on a target object to be inspected for inspecting electrical characteristics of said element, said probe comprising:

2. The probe card according to claim 1, wherein said joining section of at least one of said plural probes of the probe card is shaped linear such that the joining section extends from the base section to the contact terminal section along the outer circumferential surface of the imaginary pyramid.

3. The probe card according to claim 1, wherein the base section of the probe card is formed frame-like along the entire circumferential surface at the lower portion of the imaginary pyramid.

4. The probe card according to claim 1, wherein the plural probes of the probe card have their shapes selected in accordance with the positions of the probe card at which these probes are arranged.

5. The probe card according to claim 1, wherein the contact terminal section of the spiral joining section is shaped as an inverted square pyramid or a triangular pyramid.