Quantcast

Optical emission spectroscopic analysis of plasma parameters in tin–copper alloy co-sputtering system

Research paper by Kadhim A. Aadim

Indexed on: 05 Dec '16Published on: 23 Nov '16Published in: Optical and Quantum Electronics



Abstract

Abstract In this work, the optical emission spectroscopy was used to analyze the parameters of dc discharge plasma in dual tin–copper co-sputtering system. Discharge power of 120 W and gas pressure ranging in 0.3–0.8 mbar were considered. The emission line profiles of tin–copper alloy were experimentally observed and used to determine the electron temperature in plasma using the Boltzmann plots method, whereas the electron density was determined from the Stark broadening. The variation of electron temperature and electron density as functions of nitrogen pressure was also studied.AbstractIn this work, the optical emission spectroscopy was used to analyze the parameters of dc discharge plasma in dual tin–copper co-sputtering system. Discharge power of 120 W and gas pressure ranging in 0.3–0.8 mbar were considered. The emission line profiles of tin–copper alloy were experimentally observed and used to determine the electron temperature in plasma using the Boltzmann plots method, whereas the electron density was determined from the Stark broadening. The variation of electron temperature and electron density as functions of nitrogen pressure was also studied.