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Method and apparatus for spin coating

Imported: 24 Feb '17 | Published: 09 Sep '03

Ching-Chang Alex Hung, Lotar Peter Mahneke, Ying-Yi Chen

USPTO - Utility Patents

Abstract

A rotatable cover plate assembly (

10) has a cavity (

13) and a rotatable base plate assembly (

12) has a cavity (

42) with a semiconductor wafer (

14) mounted therein. The cover plate assembly (

10) comes down onto the base plate assembly (

12) enclosing the semiconductor wafer (

14) and a dispenser (

28) in a chamber formed by the cavities (

13) and (

42). The cover and base plates (

16) and (

40) are rotated as a single assembly, and coating material dispensed by the dispenser (

28) onto the semiconductor wafer (

14). A flow regulator (

25) coupled via an exhaust manifold (

20) controls the rate of evaporate of solvent from the dispensed coating material.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

An embodiment of the present invention will now be more fully described, by way of example, with reference to the drawings of which:

FIG. 1 shows side sectional view of a spin coating apparatus in accordance with the present invention;

FIG. 2 shows a side sectional view of the spin coating apparatus in FIG. 1 in another process position;

FIG. 3 shows a flow chart detailing operation of the spin coating apparatus in FIG. 1;

FIG. 4 shows a side sectional view of the inner passage without a barrier plate and indicating air velocity therethrough; and

FIG. 5 shows a side sectional view of the inner passage with the barrier plate and indicating air velocity therethrough.

Claims

1. An apparatus for spin coating, the apparatus comprising:

2. An apparatus in accordance with claim 1 wherein the at least one vent comprises a centrally located opening in the rotatable cover plate, and the exhaust manifold is rotatably coupled to the centrally located opening.

3. An apparatus in accordance with claim 2 wherein a bearing couples the rotatable cover plate and the exhaust manifold.

4. An apparatus in accordance with claim 3 wherein the bearing comprises a ventilated bearing.

5. An in accordance with claim 1 wherein the at least one vent further comprises at least one perforated member extending across the centrally located opening.

6. An apparatus in accordance with claim 5 wherein the dispenser extends in the at least one vent.

7. An apparatus in accordance with claim 1 wherein the inner passage of the exhaust manifold further comprises at least one perforated member extending there across.

8. An apparatus in accordance with claim 1 wherein the rotatable cover plate comprises at least one perforated member extending across the cavity.

9. An in accordance with claim 8 wherein the dispenser extends in the at least one vent.

10. An apparatus in accordance with claim 1 wherein the rotatable base plate comprises at least one vent gaseously coupled to the second cavity.

11. An apparatus in accordance with claim 1 wherein the dispenser extends in the at least one vent.

12. An apparatus in accordance with claim 1 wherein the dispenser being adapted for dispensing solvent and coating material in the chamber.

13. An apparatus for spin coating, the apparatus comprising: