MEMS design and fabrication of an electrostatic vibration-to-electricity energy converter

Research paper by Yi Chiu, Chiung-Ting Kuo, Yu-Shan Chu

Indexed on: 04 Jan '07Published on: 04 Jan '07Published in: Microsystem Technologies


This paper presents a micro electrostatic vibration-to-electricity energy converter based on the micro-electromechanical system. For the 3.3 V supply voltage and 1 cm2 chip area constraints, optimal design parameters were found from theoretical calculation and Simulink simulation. In the current design, the output power is 200 μW/cm2 for the optimal load of 8 MΩ. The device was fabricated in a silicon-on-insulator wafer. Mechanical and electrical measurements were conducted. Residual particles caused shortage of the variable capacitor and the output power could not be measured. Fabrication processes are being refined to remove the back silicon substrate to eliminate residual particles and parasitic capacitance.