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Integrated circuit fuse, with focusing of current

Imported: 23 Feb '17 | Published: 22 Oct '02

Philippe Delpech, Nathalie Revil

USPTO - Utility Patents

Abstract

An integrated circuit fuse is formed on a substrate by etching a polysilicon, metal or alloy layer deposited thereon to include a central region, at the end of which are zones with electrical contacts. The central region has at least two first electrically parallel arms. A zone of intersection of the first two arms forms a point for focusing a fusing current which facilitates the fusing of the fuse by increasing local current density flowing through the integrated circuit.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The objects, features and advantages as well as others of the present invention shall be explained in greater detail in the following description of an exemplary embodiment of an integrated circuit fuse according to the present invention, made on a non-restrictive basis with reference to the appended drawings, of which:

FIG. 1 is a top view of a standard fuse according to the prior art;

FIG. 2 is a sectional view along an axis AA′ of the prior art fuse illustrated in FIG. 1 formed in an integrated circuit;

FIG. 3 is a top view of a fuse according to the present invention; and

FIG. 4 is an equivalent electrical diagram of the fuse illustrated in FIG.

3.

Claims

1. An integrated circuit fuse comprising:

2. An integrated circuit fuse according to claim 1, wherein the electrically conductive region further comprises a second pair of electrically parallel arms connected to the zone of intersection, said second pair of electrically parallel arms are respectively a prolongation of said first pair of electrically parallel arms.

3. An integrated circuit fuse according to claim 2, wherein said second pair of electrically parallel arms comprises electrical contact zones at ends of said second pair of electrically parallel arms.

4. An integrated circuit fuse according to claim 2, wherein said first pair of electrically parallel arms are substantially arranged at right angles to each other, and said second pair of electrically parallel arms are substantially arranged at right angles to each other.

5. An integrated circuit fuse according to claim 2, wherein all said first and second pair arms are substantially equal in length.

6. An integrated circuit fuse according to claim 2, wherein all said first and second pair arms are substantially equal in width.

7. An integrated circuit fuse according to claim 6, wherein the width of each arm is less than about 0.25 micrometers.

8. An integrated circuit fuse according claim 1, wherein said electrically conductive region comprises polysilicon.

9. An integrated circuit fuse according to claim 1, comprising a lower oxide layer below said electrically conductive region and an upper oxide layer above said electrically conductive region.

10. An integrated circuit fuse according to claim 9, wherein the electrical contact zones at ends of said first pair of electrically parallel arms comprises electrical contacts extending through the upper oxide layer.

11. An integrated circuit fuse comprising:

12. An integrated circuit fuse according to claim 11, wherein said second pair of electrically parallel arms are respectively a prolongation of said first pair of electrically parallel arms.

13. An integrated circuit fuse according to claim 11, wherein said first pair of electrically parallel arms are substantially arranged at right angles to each other, and said a second pair of electrically parallel arms are substantially arranged at right angles to each other.

14. An integrated circuit fuse according to claim 11, wherein all said first and second pair arms are substantially equal in length.

15. An integrated circuit fuse according to claim 11, wherein all said first and second pair arms are substantially equal in width.

16. An integrated circuit fuse according to claim 15, wherein the width of each arm is less than about 0.25 micrometers.

17. An integrated circuit fuse according claim 11, wherein said electrically conductive region comprises polysilicon.

18. An integrated circuit fuse according to claim 11, comprising a lower oxide layer below said electrically conductive region and an upper oxide layer above said electrically conductive region.

19. An integrated circuit fuse according to claim 18, wherein the electrical contact zones at ends of said first and second pairs of electrically parallel arms comprises electrical contacts extending through the upper oxide layer.