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Improvement in detection limit for time-of-flight SIMS analysis of dopants in GaN structures

Research paper by Andrew Klump, Chuanzhen Zhou, Frederick A. Stevie, Ramón Collazo, Zlatko Sitar

Indexed on: 01 Jun '18Published on: 22 Jan '18Published in: Journal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B



Abstract

Journal of Vacuum Science & Technology B, Volume 36, Issue 3, May 2018.