High-Density Radio-Frequency Magnetized Plasma Sputtering Source with Rotational Square-Shaped Arrangement of Rod Magnets for Uniform Target Utilization

Research paper by Md Amzad Hossain, T. Ide, K. Ikari, Y. Ohtsu

Indexed on: 03 Apr '16Published on: 01 Apr '16Published in: Vacuum


We have developed a high-density radio frequency (RF) magnetized sputtering plasma source with a rotational square-shaped magnet arrangement for uniform target utilization. Eight neodymium rod magnets of 30 × 5 × 3 mm, where the connection between N-pole and S-pole magnets is one side of the square, are mounted on a circular iron yoke disc and an iron cover of 5 × 3 × 1 mm is also used for magnetic shielding of otiose magnetic fields from the permanent magnets. The magnetic field simulation, the measurement of the target erosion and the time-averaged ion flux to the target have been investigated (a) without iron cover, no air gap between N-pole and S-pole magnets, (b) with iron cover, no air gap, and (c) with iron cover, 5 mm air gap, respectively. It is found that the iron covers suppress the horizontal magnetic flux density and the copper target utilization percentage increases from 74.15% to 87.49%. Moreover, by decreasing the air gap between the shielded magnets, the copper target utilization percentage rises from 83.85% to 87.49%. The target utilization as well as the time-averaged ion flux to the target is optimum for case (b).

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