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Experimental study and analytical modelling of the effect of the driving frequencies on dual frequency capacitively coupled plasmas

Research paper by P. Saikia, B. Bora, J. Schulze, H. Bhuyan

Indexed on: 04 Aug '18Published on: 30 Jul '18Published in: Physics of plasmas



Abstract

Physics of Plasmas, Volume 25, Issue 8, August 2018.