Enhanced p-type conductivity of nitrogen doped ZnO by nano/micro structured rods and Zn-rich Co-doping process

Research paper by Wei Mu, Lei L. Kerr, David C. Look

Indexed on: 29 Jun '11Published on: 29 Jun '11Published in: Electronic Materials Letters


We report the formation of p-type nitrogen doped ZnO (ZnO:N) grown by thermal-evaporation deposition. We found that the ZnO nano/micro structured rods can improve nitrogen doping. In addition, co-doping with metal (excess Zn in this study) can enhance nitrogen doping through a Zn-rich process. The effects of nitrogen precursors on the electrical and optical properties of ZnO:N were investigated. This study shows that growth process plays a critical role in the electrical properties of ZnO:N.