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Contamination prevention system and method

Imported: 24 Feb '17 | Published: 06 Jan '04

Chih-I Peng, Wen-Ten Chen, Yu-Chia Chang, Yao-Hsiang Liang

USPTO - Utility Patents

Abstract

The present invention discloses a contamination prevention system and method of use having a contamination prevention shield that cooperates with a high pressure rinse apparatus to prevent contamination of particles within a CMP apparatus. The contamination prevention shield has a cleaning cup, two vertical side shields, a front vertical shield, and a floor that cooperate to prevent leakage of fluid splattered during a high pressure rinse of the CMP apparatus and an interior portion of a CMP apparatus housing; and a high pressure rinse apparatus connected to the contamination prevention shield having a conduit with at least one nozzle for dispensing cleaning fluid during a high pressure rinse cycle. Additionally, a plurality of contamination prevention shields may be used in combination with the high pressure rinse apparatus to further prevent contamination of an interior portion of the housing and the CMP apparatus.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

These and other objects, features and advantages of the present invention will become apparent from the following detailed description and the appended drawings in which:

FIG. 1A is a perspective view of a conventional chemical mechanical polishing apparatus illustrating three spindles and three polishing pads.

FIG. 1B is a cross-sectional view of a polishing station wherein a wafer mounted in a polishing head is pressed against a polishing pad mounted on a polishing disc.

FIG. 1C is an enlarged, cross-sectional view illustrating the interaction of a slurry composition with surfaces of a wafer and a polishing pad.

FIG. 1D is a schematic of a conventional CMP illustrating the position of the spindle clean module.

FIG. 1E is a plan view of a conventional cleaning apparatus positioned in relation to a conditioner arm.

FIG. 1F is a perspective view of a conventional cleaning apparatus positioned in relation to a conditioner arm and a conditioner clean cup.

FIG. 1G is a perspective view of a conventional shield for protecting a conditioner arm and pad from slurry accumulation.

FIG. 2 is a perspective view of a contamination prevention system showing a partial cut-away view of a cleaning cup and conditioner arm shield in accordance with the present invention.

FIG. 3 is a perspective view of a contamination invention system showing an opening in a front shield in accordance with the present invention.

FIG. 4 is a perspective view of a contamination prevention system showing a partial cut-away view of a cleaning cup and conditioner arm shield and a floor in accordance with the present invention.

FIG. 5 is a simplified side view of the contamination prevention shield in accordance with the present invention.

FIG. 6 is a perspective view of a contamination prevention system showing an alternative embodiment for mounting a conduit to a contamination prevention shield and a partial cut-away view of a cleaning cup, a conditioner arm shield, and a floor in accordance with the present invention.

FIG. 7 is a simplified top view of a plurality of contamination prevention shields wherein one of the shields provides an alternative mounting means for a conduit in accordance with the present invention.

FIG. 8 is a simplified top view of a plurality of contamination prevention shields wherein a single conduit is routed therethrough for dispensing a cleaning solution during a high pressure rinse cycle in accordance with the present invention.

FIG. 9 is a cross-sectional view of plurality of contamination prevention shields each having an associated floor in accordance with the present invention.

FIG. 10 is a simplified top view of a plurality of contamination prevention shields in accordance with the present invention.

FIG. 11 is a top view of a floor of a contamination shield in accordance with the present invention.

FIG. 12 is a front view of one embodiment of a contamination prevention shield and a conduit in accordance with the present invention.

FIG. 13 is a side view of a contamination prevention shield in accordance with the present invention.

FIG. 14 is a top view of a floor of a contamination shield in accordance with the present invention.

FIG. 15 is a front view of an alternative embodiment of a contamination prevention shield and a conduit in accordance with the present invention

FIG. 16 is a side view of a contamination prevention shield in accordance with the present invention.

FIG. 17 is a top view of a floor of a contamination shield in accordance with the present invention.

FIG. 18 is a front view of an alternative embodiment of a contamination prevention shield and a conduit in accordance with the present invention

FIG. 19 is a side view of a contamination prevention shield in accordance with the present invention.

Claims

1. A contamination prevention apparatus for preventing contamination of a CMP apparatus of the type having a conditioner arm and a polishing pad and a housing having a planer wall having a top peripheral edge, an outer sidewall, an inner side wall, and a lower peripheral edge and wherein the planer wall further has an opening disposed therethrough wherein the improvement comprises:

2. The contamination prevention apparatus of claim 1 wherein the cleaning cup is integrally formed with the planer wall of the housing and cooperates with the housing to prevent contamination of the conditioner arm and the polishing pad.

3. The contamination prevention apparatus of claim 2 wherein the cleaning cup is cubular in shape and protrudes outwardly from the opening in the planer wall and from the CMP apparatus.

4. The contamination prevention apparatus of claim 1 wherein the two vertical side shields are planer having a uniform thickness and wherein each vertical side shield further comprises:

5. The contamination prevention apparatus of claim 4 further comprising:

6. The contamination prevention shield of claim 4 wherein the angular shield is in sealable engagement with the housing wall and is in further sealable engagement with the two side shields wherein the angular shield is juxtaposed between the housing wall and the two side shields and extends inwardly and downwardly from the inner side of housing wall to prevent fluid flow therebetween and wherein the angular shield further comprises:

7. The contamination prevention shield of claim 6 wherein the angular shield further comprises:

8. The contamination prevention shield of claim 4 wherein the vertical front shield is juxtaposed between the angular shield, the two side shields and the floor, the vertical front shield further sealingly engages a peripheral edge of the angular shield and further sealingly engages an associated peripheral edge of each of the two side shields and wherein the vertical front shield further comprises:

9. The contamination prevention apparatus of claim 1 wherein the contamination prevention shield is formed from acrylic.

10. The contamination prevention shield of claim 8 further comprises:

11. The contamination prevention shield of claim 1 wherein the floor provides means for directing fluid flow away from the housing wall and the cleaning cup wherein the floor of the contamination prevention shield further comprises:

12. The contamination prevention shield of claim 11 further comprising:

13. A method of using the contamination prevention apparatus of claim 11 comprising the steps of:

14. The method according to claim 13 further comprising the step of:

15. The contamination prevention shield of claim 1 wherein the conduit further comprises:

16. A contamination prevention apparatus for preventing contamination of a CMP apparatus of the type having a plurality of conditioner arms and associated polishing pads and a housing having a planer wall having a top peripheral edge, an outer sidewall, an inner side wall, and a lower peripheral edge and wherein the planer wall further has an opening disposed therethrough wherein the improvement comprises:

17. The contamination prevention apparatus of claim 16 wherein the number of contamination prevention shields is proportionate to the number of conditioning arms and associated polishing pads.

18. The contamination prevention apparatus of claim 16 wherein the floor of each contamination prevention shield is juxtaposed in an angular position to each other to allow for the optimal placement of each shield against a portion of the side wall.

19. A method of using the contamination prevention apparatus of claim 16 comprising the steps of: