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CMOS compatible metal-insulator-metal plasmonic perfect absorbers

Research paper by A. Lefebvre, D. Costantini, I. Doyen, Q. Lévesque, E. Lorent, D. Jacolin, J-;J. Greffet, S. Boutami, H. Benisty

Indexed on: 03 Jul '16Published on: 01 Jul '16Published in: Optical materials express



Abstract

A. Lefebvre, D. Costantini, I. Doyen, Q. Lévesque, E. Lorent, D. Jacolin, J-J. Greffet, S. Boutami, H. BenistyWe report the design, fabrication and characterization of CMOS compatible metal-insulator-metal (MIM) plasmonic resonators made of tungsten and silicon nitride for the mid-infrared range. These structures give rise to spectrally selective emission/absorption, which is of particular interest in the ... [Opt. Mater. Express 6, 2389-2396 (2016)]